Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Shobha; Hosadurga K.
Address:
Niskayuna, NY
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8212337 Advanced low k cap film formation process for nano electronic devices July 3, 2012
A carbon-rich silicon carbide-like dielectric film having a carbon concentration of greater than, or equal to, about 30 atomic % C and a dielectric constant of less than, or equal to, about 4.5 is provided. In some embodiments, the dielectric film may optionally include nitrogen. Whe
8129843 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac March 6, 2012
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz
7781332 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac August 24, 2010
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz










 
 
  Recently Added Patents
Heap/stack guard pages using a wakeup unit
Adjustable draw bar for trailer hitches
Area efficient through-hole connections
Switching power supply apparatus with overcurrent limiting and prolonged holding time
Front exterior of an automotive tail lamp
Method and system for weighted fair queuing
Non-intrusive processor tracing
  Randomly Featured Patents
Method for improving residual stress in tubular body
Method for accessing the pericardial space
Conversion of metal oxide to metal phosphate
Method of manufacturing structural components
Semiconductor device handling multi-level voltages
Method of making a lead-acid storage battery plate
Light pattern projector especially for welding
Refillable sheet material dispenser
Leather or leather-like composite material
System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules