Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Shobha; Hosadurga K.
Address:
Niskayuna, NY
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8212337 Advanced low k cap film formation process for nano electronic devices July 3, 2012
A carbon-rich silicon carbide-like dielectric film having a carbon concentration of greater than, or equal to, about 30 atomic % C and a dielectric constant of less than, or equal to, about 4.5 is provided. In some embodiments, the dielectric film may optionally include nitrogen. Whe
8129843 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac March 6, 2012
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz
7781332 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac August 24, 2010
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz










 
 
  Recently Added Patents
Portable reading device with mode processing
Secure soft SIM credential transfer
Customizing a range of acceptable tape dimensional stability write conditions
Methods, apparatus, and systems for facilitating control communications between disparate devices
Multi-band dipole antenna
State control of remote hosts for management of distributed applications
Register files for a digital signal processor operating in an interleaved multi-threaded environment
  Randomly Featured Patents
Device and method related to telecommunication networks
Phase-locked semiconductor laser arrays
Battery recharger
Fishing buoy
Key for a water filter assembly
Sheet feeding apparatus and image forming apparatus
Adhesive sheet comprising hollow parts and method for preparing the same
Remote delivery nozzle assembly for pressurized container
Golf club, set of golf clubs, and method of producing the same
Process for simultaneous cultivation of different mammalian cells