Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Shobha; Hosadurga K.
Address:
Niskayuna, NY
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8212337 Advanced low k cap film formation process for nano electronic devices July 3, 2012
A carbon-rich silicon carbide-like dielectric film having a carbon concentration of greater than, or equal to, about 30 atomic % C and a dielectric constant of less than, or equal to, about 4.5 is provided. In some embodiments, the dielectric film may optionally include nitrogen. Whe
8129843 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac March 6, 2012
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz
7781332 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac August 24, 2010
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz










 
 
  Recently Added Patents
Cis-alkoxy-substituted spirocyclic 1-H-pyrrolidine-2,4-dione derivatives
Computer-implemented method of constructing a stock index using index rotation
Configurable caged ball insert for a downhole tool
Technique for skipping irrelevant portions of documents during streaming XPath evaluation
High dynamic range pixel structure
Generating a representation of an object of interest
Measurement system service for a vehicle instrument panel
  Randomly Featured Patents
Volumetric metering device
Additives for special effect appearances in plastic parts
Photosensitive resin composition comprising a polyimide precursor and method for making a polyimide film pattern from the same
Folding knife
Equipment security apparatus
Radio access network integrated set-top device
Externally maintained remap information
Apparatus and method for processing biological information
Laser seeker target simulator
Dual offset cantilevered spring suspension