Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Shobha; Hosadurga K.
Address:
Niskayuna, NY
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8212337 Advanced low k cap film formation process for nano electronic devices July 3, 2012
A carbon-rich silicon carbide-like dielectric film having a carbon concentration of greater than, or equal to, about 30 atomic % C and a dielectric constant of less than, or equal to, about 4.5 is provided. In some embodiments, the dielectric film may optionally include nitrogen. Whe
8129843 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac March 6, 2012
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz
7781332 Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spac August 24, 2010
Plasma damage in ultra low k dielectric materials during formation of a dual damascene metal interconnect structure is reduced by providing a protective spacer on sidewalls of a line trench. A densified trench bottom region may be additionally formed directly beneath an exposed horiz










 
 
  Recently Added Patents
Transmission channel for ultrasound applications
Analog-to-digital converter control using signal objects
Imaging lens
Treatment of diabetes with milk protein hydrolysate
Mesa-shaped piezoelectric resonator element
Self cleaning rake
Transmission apparatus, receiving apparatus, method, and storage medium
  Randomly Featured Patents
Preventing denial-of-service attacks employing broadcast packets
Heat-stable polymer coating composition with antioxidant
On-chip active decoupling capacitors for regulating voltage of an integrated circuit
Method and apparatus for SRNS relocation in wireless communication systems
Acceleration of system interrupts between operating systems in guest-host relationship
Digital signature generation for hardware functional test
Toy animal figure
Solar cell module having a specific surface side cover excelling in moisture resistance and transparency
Display device and electro-optical apparatus using same
Alarm information processing device and alarm information processing method