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Shibuya; Hakushi
Tokyo, JP
No. of patents:

Patent Number Title Of Patent Date Issued
5827339 Apparatus for generating chemical-free dry air October 27, 1998
A clean dry air generating unit that includes a fan filter unit and a dry air generating apparatus arranged within a chamber of closed construction. The fan filter unit includes an open air introducing fan, a chemical filter, and a HEPA filter. The chamber of closed construction is suppl
5752985 Clean room having an air conditioning system May 19, 1998
Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation

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