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Inventor: Shibuya; Hakushi
Address: Tokyo, JP
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5827339 |
Apparatus for generating chemical-free dry air |
October 27, 1998 |
| A clean dry air generating unit that includes a fan filter unit and a dry air generating apparatus arranged within a chamber of closed construction. The fan filter unit includes an open air introducing fan, a chemical filter, and a HEPA filter. The chamber of closed construction is suppl |
| 5752985 |
Clean room having an air conditioning system |
May 19, 1998 |
| Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation |
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