Resources Contact Us Home
Sherwood; Michael T.
Fremont, CA
No. of patents:

Patent Number Title Of Patent Date Issued
6019670 Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system February 1, 2000
A chemical mechanical polishing apparatus including a carrier head having an integral conditioning member is described. The conditioning member includes a conditioning surface that may selectively be moved into contact with a polishing surface of a polishing pad. The conditioning member
5795215 Method and apparatus for using a retaining ring to control the edge effect August 18, 1998
A process using a retaining ring assembly of a carrier head to precompress a polishing pad to reduce or minimize the edge effect in a chemical mechanical polishing process.
5681215 Carrier head design for a chemical mechanical polishing apparatus October 28, 1997
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against

  Recently Added Patents
Vehicle control apparatus
System, method, and computer program product for determining whether an electronic mail message is compliant with an etiquette policy
Systems and methods for assigning a template to an existing network configuration
Generating compiled code that indicates register liveness
Electric vehicle supply equipment having a socket and a method of charging an electric vehicle
All-angle light emitting element having high heat dissipating efficiency
Valved, microwell cell-culture device and method
  Randomly Featured Patents
Gapped-plate capacitor
Assembly for mounting an exhaust system on an exhaust gas source source of an internal combustion engine
Display screen with graphical user interface
Method for making a capped electric lamp by using reduced internal pressure to collapse glass
Method for producing microcapsule
Machine for packaging articles into boxes
Apparatus for the conveyance and/or treatment of hot gases
Hand grip for a tennis racket
Benzamide inhibitors of the P2X7 Ereceptor
Aster plant named `Thyra Viking`