Resources Contact Us Home
Sherwood; Michael T.
Fremont, CA
No. of patents:

Patent Number Title Of Patent Date Issued
6019670 Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system February 1, 2000
A chemical mechanical polishing apparatus including a carrier head having an integral conditioning member is described. The conditioning member includes a conditioning surface that may selectively be moved into contact with a polishing surface of a polishing pad. The conditioning member
5795215 Method and apparatus for using a retaining ring to control the edge effect August 18, 1998
A process using a retaining ring assembly of a carrier head to precompress a polishing pad to reduce or minimize the edge effect in a chemical mechanical polishing process.
5681215 Carrier head design for a chemical mechanical polishing apparatus October 28, 1997
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against

  Recently Added Patents
Denial of service (DoS) attack prevention through random access channel resource reallocation
Method, apparatus and article for detection of transponder tagged objects, for example during surgery
Method of purifying crude acetone stream
Managing a spinlock indicative of exclusive access to a system resource
Portable reading device with mode processing
Generating a representation of an object of interest
Vehicle display system or projection display for a motor vehicle, and calibration method
  Randomly Featured Patents
System and method for remotely dispensing media discs having an inventory management system
Heat transfer ink ribbon
Method of processing non-real time service and broadcast receiver
Phenoxyalkylamine containing pyridines
Developer holding member, method of producing a developer holding member, developing apparatus and image-forming apparatus
Low complexity decoding algorithm for tail-biting convolutional codes
Metal terminal retaining construction
Production of small metal bumps
Flexible pipe coupling
Obliquely mounted motor on scan bar assembly