Resources Contact Us Home
Sherwood; Michael T.
Fremont, CA
No. of patents:

Patent Number Title Of Patent Date Issued
6019670 Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system February 1, 2000
A chemical mechanical polishing apparatus including a carrier head having an integral conditioning member is described. The conditioning member includes a conditioning surface that may selectively be moved into contact with a polishing surface of a polishing pad. The conditioning member
5795215 Method and apparatus for using a retaining ring to control the edge effect August 18, 1998
A process using a retaining ring assembly of a carrier head to precompress a polishing pad to reduce or minimize the edge effect in a chemical mechanical polishing process.
5681215 Carrier head design for a chemical mechanical polishing apparatus October 28, 1997
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against

  Recently Added Patents
Endotracheal tube
Electronic communication device
Magnetic disk and manufacturing method thereof
Smooth silicon-containing films
Method and system for filtering home-network content
Distributed image acquisition, storage, and backup system
  Randomly Featured Patents
Filter wheel and method using filters of varying thicknesses
Controller for vehicle
Method for forming a DRAM capacitor
Cutting insert for camshaft milling cutters
Flat-top combination dresser
Cartridge paint-charging method and device therefor
Lockup clutch with a compensation flywheel mass at the torsional vibration damper
Method of fabricating a backside illuminated image sensor
Food product
Battery chamber, electronic device having the battery chamber, and imaging device having the battery chamber