Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Sherwood; Michael T.
Address:
Fremont, CA
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
6019670 Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system February 1, 2000
A chemical mechanical polishing apparatus including a carrier head having an integral conditioning member is described. The conditioning member includes a conditioning surface that may selectively be moved into contact with a polishing surface of a polishing pad. The conditioning member
5795215 Method and apparatus for using a retaining ring to control the edge effect August 18, 1998
A process using a retaining ring assembly of a carrier head to precompress a polishing pad to reduce or minimize the edge effect in a chemical mechanical polishing process.
5681215 Carrier head design for a chemical mechanical polishing apparatus October 28, 1997
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against










 
 
  Recently Added Patents
Solution based precursors
Methods, systems, and products for providing communications services
Method for reserving network bandwidth for versioned network services
Architecture, system and method for testing resistive type memory
Method for switching channels in a wireless communication network
Data portal for concurrent assessment
Multichannel device utilizing a centralized out-of-band authentication system (COBAS)
  Randomly Featured Patents
Rotor magnet of motor and having improved magnetizing pattern and method of magnetizing the same
Cloning and expression of thermostable multi genes and proteins and uses thereof
Connection seat for mounting a microphone for exclusive use along with musical instrument
Lightweight insulating concrete and method for using same
Uronic oxidation of cellulose
Clip pliers
Turbine blades
Process for formation of capacitor electrode for semiconductor device
Automated bulk communication responder
Removable door chime