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Sashida; Norikazu
Ichikawa, JP
No. of patents:

Patent Number Title Of Patent Date Issued
6631062 Electrically conductive ceramic material, a process of producing same, and an electrostatic chuc October 7, 2003
An electrically conductive ceramics comprises a compound containing at least one element belonging to the Group 3A of the periodic table and TiO.sub.2-x (0<x<2) in a range such that the TiO.sub.2-x (0<x<2) accounts for 1 to 60 wt % of the total amount of the ceramics, and

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