| Patent Number |
Title Of Patent |
Date Issued |
| 7273761 |
Box-in-box field-to-field alignment structure |
September 25, 2007 |
| A lithographic pattern includes a first scribe along an edge of a die region, and a second scribe along an opposing edge of the die region. The first scribe includes at least a first translucent box and a second translucent box. The second scribe includes at least a first opaque box |
| 6984531 |
Electrical field alignment vernier |
January 10, 2006 |
| A test structure pattern includes a first comb having a first set of tines, and a second comb having a second set of tines of the same width and spacing as the first set of tines. When the test structure pattern is stepped between fields on a wafer, the first comb and the second comb at |
| 6815128 |
Box-in-box field-to-field alignment structure |
November 9, 2004 |
| A lithographic pattern includes a first scribe along an edge of a die region, and a second scribe along an opposing edge of the die region. The first scribe includes at least a first translucent box and a second translucent box. The second scribe includes at least a first opaque box |
| 6762434 |
Electrical print resolution test die |
July 13, 2004 |
| A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The |
| 6762432 |
Electrical field alignment vernier |
July 13, 2004 |
| A test structure pattern includes a first comb having a first set of tines, and a second comb having a second set of tines of the same width and spacing as the first set of tines. When the test structure pattern is stepped between fields on a wafer, the first comb and the second comb at |
| 6649932 |
Electrical print resolution test die |
November 18, 2003 |
| A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The |
