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Rueth; Edgar
Kaul am Main, DE
No. of patents:

Patent Number Title Of Patent Date Issued
6814825 Method and device for controlling thickness during spin coating November 9, 2004
The invention relates to a method and a device for regulating the thickness of coatings or layers, in particular of bond coatings, wherein bonding is controlled in a programmed manner thereby taking into account the influence of disturbance variables. The invention can be used especially

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