| Patent Number |
Title Of Patent |
Date Issued |
| 7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
August 18, 2009 |
| An ion implantation apparatus includes an ion beam source for generating an ion beam; an implantation energy controller disposed on a path of the ion beam for controlling the ion implantation energy of the ion beam so that an ion beam having a first implantation energy is created for a |
| 7554106 |
Partial ion implantation apparatus and method using bundled beam |
June 30, 2009 |
| An ion implantation apparatus comprises an ion beam source for generating an initial ion beam, a bundled ion beam generator adapted to change the initial ion beam into a bundled ion beam based on a predetermined frequency to pass the bundled ion beam for a first time while passing the |
| 7538003 |
Method for fabricating MOS transistor |
May 26, 2009 |
| A method for fabricating a metal oxide semiconductor (MOS) transistor comprises forming a source region of a first conductivity type and a drain region of the first conductivity type, which are separated from each other by a channel region, in upper regions of a semiconductor substra |
