| Patent Number |
Title Of Patent |
Date Issued |
| RE38054 |
Reliable, modular, production quality narrow-band high rep rate F2 laser |
April 1, 2003 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator |
| 6330261 |
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
December 11, 2001 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power syst |
| 6240112 |
High pulse rate pulse power system with liquid cooling |
May 29, 2001 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
| 6151346 |
High pulse rate pulse power system with fast rise time and low current |
November 21, 2000 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
| 6018537 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser |
January 25, 2000 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator |
