| Patent Number |
Title Of Patent |
Date Issued |
| 7527141 |
System for transporting substrate carriers |
May 5, 2009 |
| In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during un |
| 7506746 |
System for transporting substrate carriers |
March 24, 2009 |
| In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during un |
| 7409263 |
Methods and apparatus for repositioning support for a substrate carrier |
August 5, 2008 |
| In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the |
| 7359767 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor |
April 15, 2008 |
| In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion |
| 7346431 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer |
March 18, 2008 |
| In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion |
| 7258520 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door ope |
August 21, 2007 |
| A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate tra |
| 7243003 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor |
July 10, 2007 |
| In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion |
| 7234584 |
System for transporting substrate carriers |
June 26, 2007 |
| In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during un |
| 6582175 |
Robot for handling semiconductor wafers |
June 24, 2003 |
| A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced |
