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Inventor:
Rao; Nagaraja P.
Address:
San Leandro, CA
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
6924004 Apparatus and method for synthesizing films and coatings by focused particle beam deposition August 2, 2005
A particle beam deposition apparatus includes a particle source for generating a plurality of particles in suspended form, an expansion chamber, and a deposition chamber connected to the expansion chamber by an aerodynamic focusing stage, and containing a substrate. The aerodynamic f










 
 
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