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Inventor: Qualey; Christopher
Address: Portland, ME
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7933685 |
System and method for calibrating a wafer handling robot and a wafer cassette |
April 26, 2011 |
| A system and method is disclosed for calibrating a semiconductor wafer handling robot and a semiconductor wafer cassette. A robot blade boot is attached to a robot blade of the semiconductor handling robot. The robot blade boot decreases a value of tolerance for the robot blade to move |
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