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Qualey; Christopher
Portland, ME
No. of patents:

Patent Number Title Of Patent Date Issued
7933685 System and method for calibrating a wafer handling robot and a wafer cassette April 26, 2011
A system and method is disclosed for calibrating a semiconductor wafer handling robot and a semiconductor wafer cassette. A robot blade boot is attached to a robot blade of the semiconductor handling robot. The robot blade boot decreases a value of tolerance for the robot blade to move

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