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Inventor: Qamar; Sohail S.
Address: Hilliard, OH
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5009765 |
Sputter target design |
April 23, 1991 |
| A cathode sputtering assembly includes a sputter target welded to a corresponding backing member, where the target and backing member are adapted for insertion into a sputtering system. The target has a reduced diameter portion profiled for receipt within a counterbored upper section |
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