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Inventor: Pencis; Chris
Address: Austin, TX
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6582175 |
Robot for handling semiconductor wafers |
June 24, 2003 |
| A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced |
| 6379095 |
Robot for handling semiconductor wafers |
April 30, 2002 |
| An apparatus for processing semiconductor wafers has an automatic robot for independently and simultaneously handling two wafers (W) at the same time on two separate transfer planes. The robot comprises a first arm assembly having a left and a right arm each mounted at one end for indepe |
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