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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Park; Yong-jo
Address:
Gyeonggi-do, KR
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7202099 Method of fabricating a laser diode that includes thermally cleaning a deposition reactor using April 10, 2007
Provided is a method of fabricating a laser diode including a lower Al-containing semiconductor material layer, a active layer, and an upper Al-containing semiconductor material layer. The method includes thermally cleaning the inside of a deposition reactor in which a substrate on which


 
 
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