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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Otani; Yasuto
Address:
Kawasaki, JP
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
5127989 Method of forming a thin film pattern with a trapezoidal cross section July 7, 1992
The present invention provides a method of forming a thin film pattern with a trapezoidal cross section. In this method, a resist pattern with an inverted-trapezoidal cross section is formed on a thin film. Using the resist pattern with the inverted-trapezoidal cross section as a mask, t










 
 
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