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Ogawa; Jun
Niigata, JP
No. of patents:

Patent Number Title Of Patent Date Issued
7959139 Noncontact rotating processor June 14, 2011
Provided is a noncontact apparatus for performing rotating process to a subject to be processed, without contaminating environment in an airtight container. A spin head (1) is held on a holder (7) in an airtight container, a pinning force is generated between the spin head (1) and a

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