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Nordin; Anis Nurashikin
Selangor, MY
No. of patents:

Patent Number Title Of Patent Date Issued
8143681 Saw devices, processes for making them, and methods of use March 27, 2012
The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 .mu.m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and

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