| |
|
Inventor: Nordin; Anis Nurashikin
Address: Selangor, MY
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 8143681 |
Saw devices, processes for making them, and methods of use |
March 27, 2012 |
| The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 .mu.m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and |
|
|
|
