Resources Contact Us Home
Nishimori; Yasuhiro
Hikari, JP
No. of patents:

Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and

  Recently Added Patents
Display screen of a mobile terminal or portion thereof with a graphical user interface
Integrated projector system
Systems and methods for online search recirculation and query categorization
Workflow-enabled client
Microbial fuel cell and method of use
Method of motion correction in optical coherence tomography imaging
Tiered cost model for access to a computer network
  Randomly Featured Patents
Rotating barbecue grill
Apparatus and method for folding blanks with an unusually elongated wall
Piston pump with rolling membrane
Electric power steering system for vehicles
Day/night safety sign using reflective internal lighting
Connectivity over stateful firewalls
Method and apparatus for liquefying a low-boiling gas
Internal latent image core/shell silver halide photographic emulsions
Hand launcher for clay pigeons
Supporting means for a screening device