Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nishimori; Yasuhiro
Address:
Hikari, JP
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and










 
 
  Recently Added Patents
Methods and systems for aggregating and graphically representing information associated with a telecommunications circuit
Mobile communication apparatus
Liquid crystal display and method of driving the same
Emergency whistle, flashlight, and compass
Organic semiconductor compound, semiconductor device, solar cell and producing method of organic semiconductor compound
Data recording apparatus with recording control based on defect block and control method thereof
Message transfer apparatus, output method, and computer program product
  Randomly Featured Patents
CMOS image sensor with a microlens and method for fabricating the same
Aerodynamic projectile and means for propelling same
Louverable rolling shutter
Canopy system for a building structure
High efficiency power supply front end
Lanyard-gripping handle
Flat gasket, in particular for an internal combustion engine and related manufacturing method
Apparatus and method for cardiac ablation
Screwdriver with screwdriver head storage structure
Non-magnetic mono-component developer