Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nishimori; Yasuhiro
Address:
Hikari, JP
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and










 
 
  Recently Added Patents
Techniques to manage communications resources for a multimedia conference event
Image forming apparatus and job request control method instructed by authenticated users
Spalling utilizing stressor layer portions
Rechargeable battery
High-voltage AC light-emitting diode structure
Pet urn enclosure
Cryptography on a simplified elliptical curve
  Randomly Featured Patents
Method of driving display panel, luminance correction device for display panel, and driving device for display panel
Wristwatch band
Extruded bat for the reel of a crop harvesting header
Magnetic head main pole with leading and trailing edges of different lengths and progessively increasing cross-sectional area in a height-direction
Human zygin-1
Device for preventing cribbing or sucking in horses
Method to produce pyrotechnical igniting mixtures
Compound semiconductor single crystals and the method for making the crystals, and semiconductor devices employing the crystals
Tennis ball cap
Database organization for rapid multi-set membership determination