Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nishimori; Yasuhiro
Address:
Hikari, JP
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and










 
 
  Recently Added Patents
Mobile terminal and method for changing page thereof
Image scanner and image forming apparatus
Moulded tie strips
Water bottle warning triangle
Methods and apparatus to perform time zone determination by a mobile station
Combined imaging and radiation therapy
Mobile terminal including stellar body watching hookup communications function
  Randomly Featured Patents
Apparatus and method for inspecting an outer jacket of a core containment in the region of a heat shield surrounding the core containment
Gun muzzle brake
Adjustable deck trailer apparatus
Method and apparatus for enabling customer premise public branch exchange service feature processing
Method and apparatus for fabricating diamond stud assemblies
Scaleable array of micro-engines for waveform processing
Extension spring strut
Toughened polyacetal resin composition
Method and system for recovering polyethylene from waste resin-compounds
Indole compound, optical filter and optical recording material