Resources Contact Us Home
Nishimori; Yasuhiro
Hikari, JP
No. of patents:

Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and

  Recently Added Patents
Composite materials comprising aggregate and an elastomeric composition
MiR 204, miR 211, their anti-miRs, and therapeutic uses of same
Managing a packet service call within mobile communications user equipment
Combination of a microorganism and a phytosphingosine derivative, composition, methods of use
Method of treating lung cancer
Heat retaining device
Method and apparatus for determining the altitude of a mobile device
  Randomly Featured Patents
Method and apparatus for employing network loadable debugging agents, capable of first failure support on retail versions of software products
Apparatus for righting animal cages discharge from a washing device
Inverter using current steering saturable inductors or diodes
Single post stud with locking blade
Welding gun
Die seal for semiconductor device moisture protection
Toothbar release for harvester header reel
Supporting structure for air-cleaned assembly
Automatic gain control method and apparatus in communication system having discontinuous transmission mode
Mobile bearing insert having offset dwell point