Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nishimori; Yasuhiro
Address:
Hikari, JP
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and










 
 
  Recently Added Patents
Contamination barrier
Low drop-out regulator providing constant current and maximum voltage limit
Information display
Electronic component mounting machine and operating instruction method for the same
Communication device and method for detecting a radio signal
Microcapsules, their use and processes for their manufacture
Image signal processing apparatus and image signal processing method
  Randomly Featured Patents
Fuel-consumption monitoring system for motor vehicles with manually-shifted transmissions
Feed dish for animal cages
Optical system for a flow cytometer with an interrogation zone
Linked metallocene complexes, catalyst systems, and olefin polymerization processes using same
Point of sale device with display screen
Core computer unit
Neuroprotection by indolactam V and derivatives thereof
Ink jet recording element
Surface inspection apparatus and method
Stuffed toy dog figure