Resources Contact Us Home
Nishimori; Yasuhiro
Hikari, JP
No. of patents:

Patent Number Title Of Patent Date Issued
8277563 Plasma processing method October 2, 2012
The invention provides a plasma processing method which includes (i) feeding a transferring gas which decreases a pressure difference between a processing chamber and a transfer chamber in order to prevent particles from adhering a processing sample, to be processed, passed to the pr
8114244 Method for etching a sample February 14, 2012
The invention provides a method for performing mass production processing of etching a sample capable of maintaining a stable processing profile. The method for performing mass production processing of etching for subjecting a wafer carried into a vacuum processing reactor to plasma
8075733 Plasma processing apparatus December 13, 2011
A plasma processing apparatus includes: a decompression chamber of which the inside is depressed; a gas supply unit that supplies process gas into said chamber; a microwave supply unit that supplies a microwave into the chamber to generate plasma; an object-placing electrode where a
7909933 Plasma processing method March 22, 2011
The invention provides a plasma processing method capable of reducing particle caused by flinging up of particles by airflow due to the pressure fluctuation in the processing chamber during the time the sample is carried into the processing chamber, subjected to plasma processing and

  Recently Added Patents
System and method for receiving MBMS broadcasting service
Imaging device and imaging method
Secure soft SIM credential transfer
Encoder that optically detects positional information of a moving body from different optical paths lengths
Generating network topology parameters and monitoring a communications network domain
Server system and method for discovering digital assets in enterprise information systems
Determining system for localization methods combination
  Randomly Featured Patents
Process for continuous xanthation and production of viscose spinning solution
Battery powered electric cigarette lighter with extra battery storage case
System and method for transmitting surveillance signals from multiple units to a number of points
Shoreline erosion control
Articulated connector
Copolyester and process for the production thereof
Lens control apparatus
Method and system for increasing yield of vertically integrated devices
Concurrent wireless/landline interface apparatus
Vehicle cooling system