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Inventor: Niki; Yoshio
Address: Mitaka, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7129507 |
Chip mis-position detection method |
October 31, 2006 |
| The invention is a method for detecting float or peel of semiconductor chips arranged in X and Y axes directions diced and bonded to a dicing tape on a stage. The method includes detecting float or peel of the semiconductor chips in a respective horizontal or longitudinal row arrange |
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