Resources Contact Us Home
Nguyen; Huong
Danville, CA
No. of patents:

Patent Number Title Of Patent Date Issued
6626185 Method of depositing a silicon containing layer on a semiconductor substrate September 30, 2003
A plasma cleaning method for removing deposits in a CVD chamber. The method includes introducing a cleaning gas comprising a fluorine-based gas into the chamber. A plasma is formed by exposing the cleaning gas to an inductive field generated by resonating a radio frequency current in a R
6270862 Method for high density plasma chemical vapor deposition of dielectric films August 7, 2001
A plasma processing system for processes such as chemical vapor deposition includes a plasma processing chamber, a substrate holder for supporting a substrate within the processing chamber, a dielectric member having an interior surface facing the substrate holder, the dielectric member
6184158 Inductively coupled plasma CVD February 6, 2001
A method of depositing a dielectric film on a substrate in a process chamber of an inductively coupled plasma-enhanced chemical vapor deposition reactor. Gap filling between electrically conductive lines on a semiconductor substrate and depositing a cap layer are achieved. Films havi
5835334 Variable high temperature chuck for high density plasma chemical vapor deposition November 10, 1998
An electrostatic chuck comprises an electrode cap with a dielectric layer for attracting and holding the back side of a semiconductor wafer positioned on the top surface of the dielectric layer, and a lower electrode. The electrostatic chuck is heated by resistive heating elements at

  Recently Added Patents
Pergola system
Processing data from genotyping chips
Location obtained by combining last known reliable position with position changes
Antimicrobial compositions, methods of preparation thereof, and uses thereof
Twisted conduit for geothermal heating and cooling systems
Image forming apparatus
Method of forming and filling a pouch
  Randomly Featured Patents
Compact handheld detector for greenhouse gasses
Mechanism for interpolating among samples of received communication signal using asynchronous high speed clock which is a nominal multiple of recovered signalling baud rate
Safened pesticidal resin compositions for controlling soil borne pests and process for the preparation thereof
Electronic component having micro-electrical mechanical system
Encapsulated sorbent tube
Wall-embedded door for telecommunication equipment
Phthalocyanine compound and organic photoconductor
Data cable powered light fixture
Method and apparatus for routing telecommunication calls