Resources Contact Us Home
Nguyen; Huong
Danville, CA
No. of patents:

Patent Number Title Of Patent Date Issued
6626185 Method of depositing a silicon containing layer on a semiconductor substrate September 30, 2003
A plasma cleaning method for removing deposits in a CVD chamber. The method includes introducing a cleaning gas comprising a fluorine-based gas into the chamber. A plasma is formed by exposing the cleaning gas to an inductive field generated by resonating a radio frequency current in a R
6270862 Method for high density plasma chemical vapor deposition of dielectric films August 7, 2001
A plasma processing system for processes such as chemical vapor deposition includes a plasma processing chamber, a substrate holder for supporting a substrate within the processing chamber, a dielectric member having an interior surface facing the substrate holder, the dielectric member
6184158 Inductively coupled plasma CVD February 6, 2001
A method of depositing a dielectric film on a substrate in a process chamber of an inductively coupled plasma-enhanced chemical vapor deposition reactor. Gap filling between electrically conductive lines on a semiconductor substrate and depositing a cap layer are achieved. Films havi
5835334 Variable high temperature chuck for high density plasma chemical vapor deposition November 10, 1998
An electrostatic chuck comprises an electrode cap with a dielectric layer for attracting and holding the back side of a semiconductor wafer positioned on the top surface of the dielectric layer, and a lower electrode. The electrostatic chuck is heated by resistive heating elements at

  Recently Added Patents
Mass spectrometry method
Dimmer system and damper circuit thereof
Transfer of digital data through an isolation
Methods for measuring media performance associated with adjacent track interference
Method and devices for handling access privileges
System and method for a driver circuit with a referenced control signal
Automated user interface adjustment
  Randomly Featured Patents
Carrier-dependent dithering for analog-to-digital conversion
Process for forming a functional deposited film
Method and composition for supplementation of nutritional deficiencies in renal patients
Converter and inverter support module
Solvent recovery process
Reactive-oligoimide adhesives, laminates, and methods of making the laminates
System and method for loading/unloading containers
Decoding method, decoding device, and program for the same
Clip-on sunglasses with holographic lens
Testing method for non-destructive testing of a welded connector, a testing device and an ultrasonic welding apparatus having such a device