Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nguyen; Huong
Address:
Danville, CA
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
6626185 Method of depositing a silicon containing layer on a semiconductor substrate September 30, 2003
A plasma cleaning method for removing deposits in a CVD chamber. The method includes introducing a cleaning gas comprising a fluorine-based gas into the chamber. A plasma is formed by exposing the cleaning gas to an inductive field generated by resonating a radio frequency current in a R
6270862 Method for high density plasma chemical vapor deposition of dielectric films August 7, 2001
A plasma processing system for processes such as chemical vapor deposition includes a plasma processing chamber, a substrate holder for supporting a substrate within the processing chamber, a dielectric member having an interior surface facing the substrate holder, the dielectric member
6184158 Inductively coupled plasma CVD February 6, 2001
A method of depositing a dielectric film on a substrate in a process chamber of an inductively coupled plasma-enhanced chemical vapor deposition reactor. Gap filling between electrically conductive lines on a semiconductor substrate and depositing a cap layer are achieved. Films havi
5835334 Variable high temperature chuck for high density plasma chemical vapor deposition November 10, 1998
An electrostatic chuck comprises an electrode cap with a dielectric layer for attracting and holding the back side of a semiconductor wafer positioned on the top surface of the dielectric layer, and a lower electrode. The electrostatic chuck is heated by resistive heating elements at










 
 
  Recently Added Patents
Image stabilization
Acoustic echo cancellation
Method and systems for detecting duplicate travel path
System and method for predicting remaining useful life of device components
Paging of a user equipment (UE) within a wireless communications system
Non-intrusive processor tracing
Security authentication method, apparatus, and system
  Randomly Featured Patents
Prosthetic implant
Electrolytic membrane and process for its photo-crosslinking on a cathodic membrane
Coiffure styling prop
Modular commercial microwave oven
Semi-automated operator assistance telecommunication calls
Operating device for an image processing apparatus
Determining the level of contaminants in a hydraulic system
Hybrid coupler having resistive coupling and electromagnetic coupling
Shunt barrier in pulse oximeter sensor
Vibration sound reducing device, and process for assembling elastic membrane in vibration sound reducing device