| Patent Number |
Title Of Patent |
Date Issued |
| 5090021 |
Discharge exciting pulse laser device |
February 18, 1992 |
| A discharge exciting pulse laser device such as an exima laser device. The laser device is capable of accelerating the timing of rise of the voltage between an auxiliary electrode and one of main electrodes without decreasing a discharge start voltage between the main electrodes, so that |
| 4977563 |
Laser apparatus |
December 11, 1990 |
| A laser apparatus comprising a Fabry-Perot etalon for selecting a laser oscillation wavelength and a wavelength monitor means for monitoring a laser beam taken out from a laser oscillator whose wavelength is variable, whereby the pressure at the gap in the Fabry-Perot etalon is adjusted |
| 4914662 |
Laser wavelength stabilization |
April 3, 1990 |
| A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopicall |
| 4686682 |
Discharge excitation type short pulse laser device |
August 11, 1987 |
| A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main |
