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Inventor: Nakano; Shigeki
Address: Tokyo, JP
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4611122 |
Signal detection apparatus with plural elongate beams corresponding |
September 9, 1986 |
| A signal detection apparatus comprises a device for forming with separable lights illumination areas extending in different plural directions, a scanner for causing the illumination areas to scan bar-like marks extending in different directions on an object, and a photoreceptor for s |
| 4487505 |
Apparatus for processing a signal for alignment |
December 11, 1984 |
| An apparatus for processing a signal for aligning a mask having at least one standard mark thereon with a wafer having at least one reference mark thereon, includes a first sensor for sensing the standard mark, a second sensor for sensing the reference mark through the mask, a threshold |
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