| Patent Number |
Title Of Patent |
Date Issued |
| 7594517 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber fo |
September 29, 2009 |
| The present invention prevents substantial reduction of flow rate control accuracy in a small flow quantity range, achieves accurate flow rate control over the entire range of flow rate control, and also allows control of a wide pressure range of a chamber with accurate flow rate con |
| 7553459 |
Apparatus and reactor for generating and feeding high purity moisture |
June 30, 2009 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7368092 |
Apparatus and reactor for generating and feeding high purity moisture |
May 6, 2008 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7367241 |
Differential pressure type flowmeter and differential pressure type flow controller |
May 6, 2008 |
| A differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P.sub.1 on the upstream side of an orifice, a detector to detect a fluid pressure P.sub.2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream si |
| 7258845 |
Apparatus and reactor for generating and feeding high purity moisture |
August 21, 2007 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7219533 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and s |
May 22, 2007 |
| A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the c |
| 7109684 |
Secondary cell charger and charging method |
September 19, 2006 |
| An equipment and method for charging a secondary battery are provided to quickly and surely charge a secondary battery (secondary batteries) while preventing the secondary battery (batteries) from overcharging or insufficient charging. Special charging voltage E.sub.s is applied to a |
| 7085628 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatu |
August 1, 2006 |
| A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor bet |
| 6964279 |
Pressure-type flow rate control apparatus |
November 15, 2005 |
| A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by:Also provided is an improved pressure |
| 6413680 |
Optical recording method, optical recording medium, and optical recording system |
July 2, 2002 |
| An optical recording method suited for recording a very small object or movement of a living organism such as a microorganism, which comprises irradiating an informative object set on or above a recording layer comprising a photosensitive material capable of undergoing a storable and |
| 6117595 |
High sodium ion conducting inorganic composite solid electrolyte and method for production there |
September 12, 2000 |
| A high sodium ion conducting inorganic composite solid electrolyte obtained by mixing Na.sub.4 Zr.sub.2 Si.sub.3 O.sub.12 with titanium oxide and sintering the resultant mixture and a method for the production of a high sodium ion conducting inorganic composite solid electrolyte, consist |
