Resources Contact Us Home
Nagayasu; Hiroshi
Kasuga, JP
No. of patents:

Patent Number Title Of Patent Date Issued
8133327 Substrate processing method, storage medium and substrate processing apparatus March 13, 2012
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate depending on the kind of the chemical liquid, when the substrate is processed with the chemica
8043467 Liquid processing apparatus and liquid processing method October 25, 2011
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal

  Recently Added Patents
Sprocket support structure
Apparatus and system for imaging currency bills and financial documents and method for using the same
Vehicle brake testing device and a method of testing a vehicle brake
Method for sealing fenestration openings
Imaging apparatus
Dual small molecule inhibitors of cancer and angiogenesis
Ranking clusters and resources in a cluster
  Randomly Featured Patents
Disk-like recording medium, disk recording apparatus and disk recording method, and disk playback apparatus and disk playback method
Saponin adjuvant compositions
Energy recovery system
Aseptic processing system
Method for growth of bacteria, minimising the release of endotoxins from the bacteria into the surrounding medium
Shrub rose plant named `AUSjameson`
Colored composition and photosensitive transfer material for producing black matrix, black matrix and method for producing the same, color filter, liquid crystal display, and black matrix subs
Hot roller carrying case
Circuit and method for generating internal clock signal
Acetoacetylated N-phenyl-p-phenylenediamines