Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nagayasu; Hiroshi
Address:
Kasuga, JP
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
8133327 Substrate processing method, storage medium and substrate processing apparatus March 13, 2012
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate depending on the kind of the chemical liquid, when the substrate is processed with the chemica
8043467 Liquid processing apparatus and liquid processing method October 25, 2011
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal










 
 
  Recently Added Patents
Wafer-level chip scale package
Techniques to manage communications resources for a multimedia conference event
Polymer compositions and nonwoven compositions prepared therefrom
Navigating applications using side-mounted touchpad
Dynamic learning method and adaptive normal behavior profile (NBP) architecture for providing fast protection of enterprise applications
Systems and methods for providing power and data to lighting devices
Systems and methods for tracking power modulation
  Randomly Featured Patents
Ice-making device for refrigerator
Image display apparatus with mechanism for modifying the appearance of the periphery of a display device
System and method for reporting and delivering calls
Magnetic device with weakly exchange coupled antiferromagnetic layer
Potassium taurate bicarbonate and ascorbate
Fuel cylinder mounting structure in motorcar
Method for measuring flow rates in liquid melts
Constant head device for a cleaning machine
Process for repairing turbine components
Portable intruder detection system for campsites