Resources Contact Us Home
Nagayasu; Hiroshi
Kasuga, JP
No. of patents:

Patent Number Title Of Patent Date Issued
8133327 Substrate processing method, storage medium and substrate processing apparatus March 13, 2012
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate depending on the kind of the chemical liquid, when the substrate is processed with the chemica
8043467 Liquid processing apparatus and liquid processing method October 25, 2011
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal

  Recently Added Patents
Pear tree named `PremP109`
Pyroelectric detector, pyroelectric detection device, and electronic instrument
Workflow optimization for high throughput imaging environments
Visual processing apparatus and visual processing method
Soybean cultivar CL1013675
System and method for discontinuous reception control start time
System and method for testing an integrated circuit embedded in a system on a chip
  Randomly Featured Patents
Erosion prevention device
Shaft angle encoder with a symmetrical code wheel
Moving target practice firing simulator
Output control circuit for semiconductor memory
Stable reference voltage generator circuit
Interconnection tab used with optical devices
Pneumatic tire having tread including convexly curved fine grooves
Corona discharge element
Agricultural tilting bearing support
Geothermal well head