Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nagayasu; Hiroshi
Address:
Kasuga, JP
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
8133327 Substrate processing method, storage medium and substrate processing apparatus March 13, 2012
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate depending on the kind of the chemical liquid, when the substrate is processed with the chemica
8043467 Liquid processing apparatus and liquid processing method October 25, 2011
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal










 
 
  Recently Added Patents
Case for camera
Braided boomerang pet toy
Tetrazolyl oxime derivative, salt thereof, and plant disease control agent
Method of and apparatus for image denoising
Reference circuit with curvature correction using additional complementary to temperature component
Vehicle-mounted camera stabilized passively by vibration isolators
Highly stable electrolytic water with reduced NMR half line width
  Randomly Featured Patents
Double polysilicon process for fabricating CMOS integrated circuits
Information display device
Imidazolones and their use in treating benign prostatic hyperplasia and other disorders
Cap and means for retaining cap liner
Vehicle window cleaning system
Hydraulically operated transmission
Address input buffer with signal converter
Load responsive control valve
Table
Flavoring with cyclohexene methanol lower alkyl esters