Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Nagayasu; Hiroshi
Address:
Kasuga, JP
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
8133327 Substrate processing method, storage medium and substrate processing apparatus March 13, 2012
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate depending on the kind of the chemical liquid, when the substrate is processed with the chemica
8043467 Liquid processing apparatus and liquid processing method October 25, 2011
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal










 
 
  Recently Added Patents
Listing recommendation using generation of a user-specific query in a network-based commerce system
Programming method of non-volatile memory device
Configurable logic cells
Digital X-ray detector arrangement and digital X-ray imaging method
Non-intrusive processor tracing
End to end email monitor
Apparatus and method for image encoding/decoding using predictability of intra-prediction mode
  Randomly Featured Patents
Semiconductor integrated circuit having high-speed and low-power logic gates with common transistor substrate potentials, and design data recording medium therefor
New cosmetic or dermopharmaceutical compositions in the form of aqueous gels modified by the addition of expanded microspheres
Optical sensor
Finned heat exchanger for electronic equipment
Portable banner display
Side portion of a shoe upper
Compressed air foam generator
Two knuckle hinges
Tracking workflow in manipulating media items
Rotary indexing apparatus