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Inventor: Nagai; Yoshiyuki
Address: Utsunomiya, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7031364 |
Gas laser device and exposure apparatus using the same |
April 18, 2006 |
| In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is totally reflected by a total reflection mirror. An output window partially reflects the las |
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