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Inventor: Moro; Yoshiaki
Address: Tokyo, JP
No. of patents: 4
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7554136 |
Micro-switch device and method for manufacturing the same |
June 30, 2009 |
| A micro device that is manufactured by semiconductor process and is electrically connected to outside for its operation. The micro device includes a circuit board, an electrode pad being provided on the circuit board, a lead substrate being provided substantially parallel to the circ |
| 7276707 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
October 2, 2007 |
| A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second |
| 6953938 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
October 11, 2005 |
| A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second |
| 6818911 |
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, |
November 16, 2004 |
| This invention provides a reliable blanking aperture array. An insulating layer and conductive layer are sequentially formed on the lower surface of a substrate. Then, a plurality of pairs of opposing trenches are formed in the substrate, and an insulating layer is formed on each of the |
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