| Patent Number |
Title Of Patent |
Date Issued |
| 7595087 |
Process of forming platinum coating catalyst layer in moisture-generating reactor |
September 29, 2009 |
| A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost. The moisture-generating reactor in which hydrog |
| 7553459 |
Apparatus and reactor for generating and feeding high purity moisture |
June 30, 2009 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7472887 |
Valve for vacuum exhaustion system |
January 6, 2009 |
| The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent t |
| 7416165 |
Diaphragm valve for the vacuum exhaustion system |
August 26, 2008 |
| A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body |
| 7368092 |
Apparatus and reactor for generating and feeding high purity moisture |
May 6, 2008 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7258845 |
Apparatus and reactor for generating and feeding high purity moisture |
August 21, 2007 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7103990 |
Rotary silicon wafer cleaning apparatus |
September 12, 2006 |
| It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According |
| 7008598 |
Reactor for generating moisture |
March 7, 2006 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the d |
| 6919056 |
Reactor for generating moisture |
July 19, 2005 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wher |
| 6848470 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
February 1, 2005 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6820632 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
November 23, 2004 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6733732 |
Reactor for generating moisture |
May 11, 2004 |
| A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed |
| 6672942 |
Grinding machine for welding electrodes |
January 6, 2004 |
| A grinding machine for welding electrodes comprises a housing 1, grinder motor 2, grinding disk 3, swing plate 4, holder guide 6, electrode holder 7, electrode turning motor 8 and swing plate moving mechanism 9. The axis .phi.a of electrode A extends along a line perpendicular to the axi |
| 6622543 |
Gas detection sensor |
September 23, 2003 |
| A gas detection sensor permits precise measurement of the concentration of flammable gas in a detection or subject gas and the concentration of oxygen in a detection gas containing flammable gases. In the sensor, the heating of the sensor by contact catalytic reaction of flammable gas gi |
| 6422264 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
July 23, 2002 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6408879 |
Fluid control device |
June 25, 2002 |
| A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the secon |
| 6387158 |
Method of removing moisture in gas supply system |
May 14, 2002 |
| A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than |
| 6334962 |
Low flow rate moisture supply process |
January 1, 2002 |
| A process of supplying moisture at low flow rates which permits high precision control of the flow of moisture to a semiconductor manufacturing line from an apparatus for the generation of moisture, characterized in that the flow of hydrogen to a moisture-generating reactor is controlled |
| 6274098 |
Apparatus for the treatment of exhaust gases by combining hydrogen and oxygen |
August 14, 2001 |
| An apparatus for the treatment of exhaust gases containing hydrogen which permits always stable treatment with certainty of the exhaust gases from a semiconductor manufacturing line or the like irrespective of violent fluctuations in the flow rate of the exhaust gases, without having adv |
| 6273477 |
Gasket and pipe joint |
August 14, 2001 |
| A pipe joint comprises a pair of tubular joint members, an annular gasket interposed between opposed end faces of the two joint members, and threaded means for joining the two joint members. Each of the joint members is prepared from a stainless steel having a surface with a Vickers |
| 6180067 |
Reactor for the generation of water |
January 30, 2001 |
| An improved reactor for generating water from hydrogen and oxygen which allows production of moisture at a high conversion rate exceeding 99 percent with the temperature kept under some 400.degree. C. inside the reactor shell (1) and with the water vapor production being more than 1, |
| 6093662 |
Method for generating water for semiconductor production |
July 25, 2000 |
| Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and |
| 5879819 |
Sliding parts and process for producing same |
March 9, 1999 |
| A sliding part has a film of an Ag-In alloy comprising 25 to 35 wt. % of In and the balance Ag and inevitable impurities and formed on a surface of a stainless steel main body thereof which surface is slidable on other stainless steel part. The Ag-In alloy has a close-packed hexagonal cr |
| 5816285 |
Pressure type flow rate control apparatus |
October 6, 1998 |
| A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than |
| 5791369 |
Pressure type flow rate control apparatus |
August 11, 1998 |
| A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) pr |
| 5711197 |
Tube facing machine |
January 27, 1998 |
| A cutter for facing ends of tubes has a cutting edge perpendicular to the axis of a drive shaft and extending obliquely from a plane containing a reference side face of the cutter. The cutter has a base end portion fitted in a cutter mount groove which is defined by a reference side face |
| 5669408 |
Pressure type flow rate control apparatus |
September 23, 1997 |
| A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) pr |
| 5530283 |
Lead frame and lead frame material |
June 25, 1996 |
| An object of the present invention is to provide a lead frame and a material for lead frame which insure excellent bonding and enables substantial reduction of time for production because such processes as plating are not required and furthermore are excellent in abration resistance. |
| 5520492 |
Sliding parts and method of producing same |
May 28, 1996 |
| A sliding part having a metallic main body which is formed with a silver plating layer over a surface thereof slidable in contact with other metallic part. The silver plating layer has a crystal structure so adapted that the intensity of diffraction X-rays diffracted by the (200) plane |
| 5440096 |
Welding process with delayed application of full current until after start of arc |
August 8, 1995 |
| In an arc welding process for welding pipes used to convey high purity gas, dispersion of particles into the pipes during welding is reduced by discharging an inert back shielding gas into one end of one pipe and holding the welding current at less than the normal welding current for a |
