| Patent Number |
Title Of Patent |
Date Issued |
| RE33193 |
Ion beam processing apparatus and method of correcting mask defects |
April 3, 1990 |
| Disclosed is an ion beam processing apparatus comprising within a vacuum container a specimen chamber with a table for mounting a specimen provided therein, a high intensity ion source, such as a liquid metal ion source or an electric field ionizing ion source which operates in ultra-low |
| 5968382 |
Laser cleavage cutting method and system |
October 19, 1999 |
| A cutting system for cutting a workpiece by laser emission relies upon local cooling of the workpiece at the point at which cutting starts and ends. Optionally, local cooling can also be provided at a cross point where two cutting lines intersect. Relying upon the difference in thermal |
| 5832595 |
Method of modifying conductive lines of an electronic circuit board and its apparatus |
November 10, 1998 |
| A method of modifying an electronic circuit board by performing disconnection or connection of conductive lines at a specified or an arbitrary position of the conductive lines of the electronic circuit board thereby changing an electric circuit and of completely modifying an open pat |
| 5824598 |
IC wiring connecting method using focused energy beams |
October 20, 1998 |
| An IC wiring connecting method for interconnecting conductive lines of the same wiring plane of an IC chip for correcting the wiring, for interconnecting conductive lines of different wiring lanes of a multilayer IC chip at the same position, or for connecting a conductive line of a |
| 5497034 |
IC wiring connecting method and apparatus |
March 5, 1996 |
| An IC wiring connecting method for interconnecting conductive lines of the same wiring plane of an IC chip for correcting the wiring, for interconnecting conductive lines of different wiring lanes of a multilayer IC chip at the same position, or for connecting a conductive line of a |
| 5472507 |
IC wiring connecting method and apparatus |
December 5, 1995 |
| An IC wiring connecting method for interconnecting conductive lines of the same wiring plane of an IC chip for correcting the wiring, for interconnecting conductive lines of different wiring lanes of a multilayer IC chip at the same position, or for connecting a conductive line of a |
| 5229569 |
Laser machining apparatus and method of the same |
July 20, 1993 |
| A laser machining apparatus includes a laser beam source, such as of excimer laser, which produces a laser beam to be projected on a work piece or a sample, first and second illumination light sources which have wavelengths substantially equal to the wavelength of the laser beam and |
| 5208437 |
Method of cutting interconnection pattern with laser and apparatus thereof |
May 4, 1993 |
| In an interconnection film cutting method and apparatus therefor according to the present invention, a laser beam having a pulse width of 10.sup.-9 second or less is illuminated on a desired portion of the interconnection pattern of a semiconductor device, such as a link used for redunda |
| 5023407 |
Printed circuit board with a uniform conductive layer formed by equalization of metals therein |
June 11, 1991 |
| A metal layer other than gold is formed on a ceramic substrate, a gold layer is further formed on said metal layer, and then a high density beam is applied to the treated substrate member. Thereby, the metal of the underlayer diffused through the grain boundaries of gold up to the surfac |
| 4933565 |
Method and apparatus for correcting defects of X-ray mask |
June 12, 1990 |
| The present invention relates to a method and apparatus for correcting defects of an X-ray mask which includes a focused ion beam used to irradiate at least a region having a defective portion of an X-ray mask having a protective film and eliminating the protective film; exposing a c |
| 4868068 |
IC wiring connecting method and resulting article |
September 19, 1989 |
| A IC wiring connecting method for interconnecting conductive lines of the same wiring plane of an IC chip for correcting the wiring, for interconnecting conductive lines of different wiring lanes of a multilayer IC chip at the same position, or for connecting a conductive line of a l |
| 4687939 |
Method and apparatus for forming film by ion beam |
August 18, 1987 |
| An ion beam apparatus which comprises an enclosure defining a chamber of high vacuum. A crucible for producing vapor of a material, ionizing means, ion accelerating means, and a substrate to be deposited with the vaporized material to thereby form a film thereon are disposed within the c |
| 4683378 |
Apparatus for ion beam work |
July 28, 1987 |
| This invention discloses an ion beam work apparatus which comprises ion mean radiation means for focusing and radiating an ion beam extracted from an ion source to a target put on a moving mechanism, and scanning two-dimensionally the radiation position; secondary particle detection |
| 4609566 |
Method and apparatus for repairing defects on a photo-mask pattern |
September 2, 1986 |
| A photo-mask is mounted on a repairing chamber, with its mask pattern forming surface being exposed to the interior of the chamber. Vaporized repairing material which includes a metallic element is introduced into the chamber, and a laser beam is projected from the exterior of the ch |
| 4566765 |
Apparatus for summing several ring-shape laser beams |
January 28, 1986 |
| A light source apparatus comprises one laser oscillator, at least one other laser oscillator, a light converter for converting a laser beam emitted from the other laser oscillator into a ring-shaped laser beam, and a reflecting mirror for passing a laser light beam emitted from the one |
| 4510222 |
Photomask with corrected white defects |
April 9, 1985 |
| A photomask with white defects that have corrected with a film comprising a mixture of silver and tantalum oxide. The film has a good resistance to chemicals. |
| 4503329 |
Ion beam processing apparatus and method of correcting mask defects |
March 5, 1985 |
| Disclosed is an ion beam processing apparatus comprising within a vacuum container a specimen chamber with a table for mounting a specimen provided therein, a high intensity ion source, such as a liquid metal ion source or an electric field ionizing ion source which operates in ultra-low |
| 4463073 |
Method and apparatus for redressing defective photomask |
July 31, 1984 |
| A method and apparatus for repairing defect portions of a photomask. A complex material from which a light shading material can be deposited is applied over the photomask. A white (blank) defect region is irradiated with a continuous wave laser light beam projected in a slit-like light |
| 4444801 |
Method and apparatus for correcting transparent defects on a photomask |
April 24, 1984 |
| A method and apparatus for correcting transparent defects on a photomask are disclosed. A metal-organic complex solution is applied to a transparent defect portion and its periphery on the photomask. The transparent defect portion is then exposed to a visible ray or ultraviolet ray t |
