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Inventor: Mikumo; Akira
Address: Itami, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
June 30, 2009 |
| A ceramic heater attaining more uniform temperature distribution from the start to the end of cooling is provided. Further, in a cooling module used for cooling the heater, liquid leakage during use is prevented, degradation in cooling capability is prevented and the performance is m |
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