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Inventor: Merry; Walter R.
Address: Sunnyvale, CA
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7554334 |
Matching network characterization using variable impedance analysis |
June 30, 2009 |
| Embodiments of a method of calculating the equivalent series resistance of a matching network using variable impedance analysis and matching networks analyzed using the same are provided herein. In one embodiment, a method of calculating the equivalent series resistance of a matching |
| 7358192 |
Method and apparatus for in-situ film stack processing |
April 15, 2008 |
| Embodiments of a cluster tool, processing chamber and method for processing a film stack are provided. In one embodiment, a method for in-situ etching of silicon and metal layers of a film stack is provided that includes the steps of etching an upper metal layer of the film stack in |
| 7056830 |
Method for plasma etching a dielectric layer |
June 6, 2006 |
| A method of etching a dielectric layer formed on a substrate including a sequence of processing cycles, wherein each cycle comprises steps of depositing an inactive polymeric film, activating the film to etch the structure, and removing the film is disclosed. In one embodiment, the m |
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