| Patent Number |
Title Of Patent |
Date Issued |
| 7601050 |
Polishing apparatus with grooved subpad |
October 13, 2009 |
| A polishing apparatus is described. The polishing apparatus includes a rotatable platen, a drive mechanism to incrementally advance a polishing sheet having a polishing surface in a linear direction across the platen, a subpad on the platen to support the polishing sheet, the subpad havi |
| 7553214 |
Polishing article with integrated window stripe |
June 30, 2009 |
| A method is described. The method includes contacting a non-solid material to a non-linear edge of a sheet of polishing material, and causing the non-solid material to solidify to form a window that contacts the non-linear edge of the polishing material. |
| 7429210 |
Materials for chemical mechanical polishing |
September 30, 2008 |
| A polishing article and method for manufacturing a polishing article for use in a chemical mechanical polishing process is disclosed. The polishing article has a plurality of polishing material tiles separated by grooves formed in or through a polishing material and may be adhesively |
| 7179159 |
Materials for chemical mechanical polishing |
February 20, 2007 |
| A polishing article and method for manufacturing a polishing article for use in a chemical mechanical polishing process is disclosed. The polishing article has a plurality of polishing material tiles separated by grooves formed in or through a polishing material and may be adhesively |
| 7063597 |
Polishing processes for shallow trench isolation substrates |
June 20, 2006 |
| Methods and compositions are provided for planarizing a substrate surface with reduced or minimal topographical defect formation during a polishing process for dielectric materials. In one aspect a method is provided for polishing a substrate containing two or more dielectric layers, suc |
