| Patent Number |
Title Of Patent |
Date Issued |
| 7596164 |
Control system for a two chamber gas discharge laser |
September 29, 2009 |
| The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplifie |
| 7167499 |
Very high energy, high stability gas discharge laser surface treatment system |
January 23, 2007 |
| A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber laser system comprising, a first laser unit comprising, a first and second gas |
| 7101203 |
Method and apparatus for electronically interconnecting high voltage modules positioned in relat |
September 5, 2006 |
| Apparatus and method for electrically connecting two closely positioned high voltage modules with little or no bend and without any loops in an electrical interconnecting coaxial cable may have a high voltage connector attached to at least a portion of the cable on at least one end o |
| 7079564 |
Control system for a two chamber gas discharge laser |
July 18, 2006 |
| The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplifie |
| 7039086 |
Control system for a two chamber gas discharge laser |
May 2, 2006 |
| The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplifie |
| 7002443 |
Method and apparatus for cooling magnetic circuit elements |
February 21, 2006 |
| An apparatus and method for providing cooling to a magnetic circuit element having a magnetic core disposed around a centrally located core support member having at least one core support member wall is disclosed which may comprise a core support coolant inlet; a core support coolant |
| 6914919 |
Six to ten KHz, or greater gas discharge laser system |
July 5, 2005 |
| The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,0000 pulses power second. Preferred embodiments are configured as KrF, ArF and F.sub.2 lasers used for light |
| 6882674 |
Four KHz gas discharge laser system |
April 19, 2005 |
| The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated cir |
| 6757316 |
Four KHz gas discharge laser |
June 29, 2004 |
| The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated cir |
| 6690704 |
Control system for a two chamber gas discharge laser |
February 10, 2004 |
| The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplifie |
| 6240112 |
High pulse rate pulse power system with liquid cooling |
May 29, 2001 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
| 6151346 |
High pulse rate pulse power system with fast rise time and low current |
November 21, 2000 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
| 6028872 |
High pulse rate pulse power system with resonant power supply |
February 22, 2000 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
| 5936988 |
High pulse rate pulse power system |
August 10, 1999 |
| A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse |
