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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Mei; Wenhui
Address:
Plano, TX
No. of patents:
15
Patents:












Patent Number Title Of Patent Date Issued
7932993 Divided sub-image array scanning and exposing system April 26, 2011
An "image writing" and "image reading" system and method for providing a pattern to a subject such as a wafer is provided or an image to an image sensor such as CCD. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display or other SLM, for generatin
7164961 Modified photolithography movement system January 16, 2007
A method and system is provided for moving a substrate relative to a pixel panel in a digital photolithography system. The method can be used for performing photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a se
7062094 System and method for lossless data transmission June 13, 2006
A method for losslessly transmitting data is provided. The data is separated into two or more portions and the second portion is subtracted from the first portion to find a difference. The first portion and the difference are transmitted, and then the second portion is reconstructed
6965387 Real time data conversion for a digital display November 15, 2005
A system and method for extracting and manipulating image data is provided. A pixel panel is rotated so as to increase a resolution of a projected image. The rotation may be calculated so as to achieve a desired resolution. A portion of the image is retrieved from a memory and an add
6606739 Scaling method for a digital photolithography system August 12, 2003
A method for scaling a pixel location in a digital photolithography system by rotating a pixel panel is provided. The method determines the angle of rotation of the pixel panel relative to a subject and calculates the original location of the pixel to be scaled. The method calculates the
6552779 Flying image of a maskless exposure system April 22, 2003
A system for image-scanning a pixel-mask pattern onto a subject, such as a subject in digital photolithography, is provided. The system includes a pixel panel for generating a pixel pattern formed of pixel elements. A lens system positioned between the panel and the subject simultaneousl
6537738 System and method for making smooth diagonal components with a digital photolithography system March 25, 2003
A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality o
6529262 System and method for performing lithography on a substrate March 4, 2003
Disclosed is a method, system, and lense system for performing lithography on a substrate. The system includes a unique lense system for nonplanar substrates. The lense system includes a first lense section for receiving a pattern and producing a concave image of the pattern. The concave
6512625 Light modulation device and system January 28, 2003
A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third el
6509955 Lens system for maskless photolithography January 21, 2003
A system for performing digital lithography onto a subject is provided. The system utilizes pixel panels to generate pixel patterns. Mirrors are utilized to divert and align the pixel elements forming the patterns onto a subject. A gradient lens system positioned between the panels and t
6498643 Spherical surface inspection system December 24, 2002
Method and apparatus are described for a spherical surface inspection system comprising a controller having software, an optical sensor connected to the controller, and an inspection device disposed adjacent to the optical sensor, and connected to the controller. The inspection device
6493867 Digital photolithography system for making smooth diagonal components December 10, 2002
A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality o
6473237 Point array maskless lithography October 29, 2002
A system for performing digital lithography onto a subject is provided. The system includes a noncoherent light source for producing a first light and an optical diffraction element for individually focusing the first light into a plurality of second lights. The system also includes a pi
6433917 Light modulation device and system August 13, 2002
A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third el
6425669 Maskless exposure system July 30, 2002
A photolithography system and method for providing a pattern to a subject such as a wafer is provided. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display, for generating for creating a plurality of pixel elements of the pattern. The pixel eleme










 
 
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