| Patent Number |
Title Of Patent |
Date Issued |
| 8264134 |
Ultraminiature broadband light source with spiral shaped filament |
September 11, 2012 |
| An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that c |
| 7755292 |
Ultraminiature broadband light source and method of manufacturing same |
July 13, 2010 |
| An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that c |
| 6230566 |
Micromachined low frequency rocking accelerometer with capacitive pickoff |
May 15, 2001 |
| A micro electro mechanical sensor that uses capacitive readout electronics. The sensor involves a micromachined low frequency rocking accelerometer with capacitive pickoff fabricated by deep reactive ion etching. The accelerometer includes a central silicon proof mass, is suspended by a |
| 6071426 |
Micro benchtop optics by bulk silicon micromachining |
June 6, 2000 |
| Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical |
| 5969848 |
Micromachined electrostatic vertical actuator |
October 19, 1999 |
| A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The |
