| Patent Number |
Title Of Patent |
Date Issued |
| 5815396 |
Vacuum processing device and film forming device and method using same |
September 29, 1998 |
| The present invention relates to vacuum processing equipment for processing a wafer in a vacuum, and film coating or forming equipment and method for forming a film on a wafer wherein radiation measurement and temperature control of the wafer is carried out by using an infrared radiation |
| 5707500 |
Vacuum processing equipment, film coating equipment and deposition method |
January 13, 1998 |
| The present invention relates to vacuum processing equipment for processing a wafer in a vacuum, and film coating or forming equipment and method for forming a film on a wafer wherein radiation measurement and temperature control of the wafer is carried out by using an infrared radiation |
| 4721535 |
Solar cell |
January 26, 1988 |
| A solar cell including at least a thin film formed of an amorphous silicon material and having p-type conductivity. The thin film comprises a multi-layer structure including at least one non-doped layer formed of a material of an amorphous silicon material and having a thickness of 10 to |
| 4642412 |
Photo-electronic conversion apparatus with light pattern discriminator |
February 10, 1987 |
| A plurality of photovoltaic devices (e.g., solar cells) connect with each other and form a photo-electric conversion apparatus. The photovoltaic devices concerned are so connected with each other that when a given pattern of light is irradiated upon the photo-electric conversion appa |
