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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Manchanda; Lalita
Address:
Basking Ridge, NJ
No. of patents:
3
Patents:




Patent Number Title Of Patent Date Issued
7456064 High K dielectric material and method of making a high K dielectric material November 25, 2008
A dielectric material having a high dielectric constant includes a Group III metal oxide and a Group V element. The incorporation of the Group V element in the Group III metal oxide material reduces the number of structural defects in the dielectric material, and reduces both the fixed
6680130 High K dielectric material and method of making a high K dielectric material January 20, 2004
A dielectric material having a high dielectric constant includes a Group III metal oxide and a Group V element. The incorporation of the Group V element in the Group III metal oxide material reduces the number of structural defects in the dielectric material, and reduces both the fixed
6124158 Method of reducing carbon contamination of a thin dielectric film by using gaseous organic precu September 26, 2000
A process is provided for the formation of a thin film of gate dielectric or similar material on a silicon semiconductor substrate from an organic precursor by atomic layer epitaxy, wherein the organic precursor is introduced to react with the treated surface to form a bonded monolayer o


 
 
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