| Patent Number |
Title Of Patent |
Date Issued |
| 7602958 |
Mirror node process verification |
October 13, 2009 |
| An inspection image analysis system. At least one image processing computer is configured to receive and analyze at least one portion of an image. At least one test computer is configured to receive at least one common portion of the image also received by the at least one image proc |
| 7570800 |
Methods and systems for binning defects detected on a specimen |
August 4, 2009 |
| Methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen. The r |
| 7555409 |
Daisy chained topology |
June 30, 2009 |
| An inspection system. The inspection system has a sensor for generating data. A first network is coupled to the sensor and communicates the data. An array of nodes is coupled to the first network, and processes the data to produce reports. Each node has an interface coupled to the first |
| 7440640 |
Image data storage |
October 21, 2008 |
| A system having a sensor array adapted to provide image data. A process node is connected to the sensor array, and analyzes portions of the image data. A job manager is connected to the process node, and instructs the process node to send the portions of the image data to a storage node. |
| 7440607 |
Outlier substrate inspection |
October 21, 2008 |
| A method of detecting anomalies in a test image. Test features of pixels within the test image are selected, and reference features of pixels within at least one reference image are also selected. A signal distribution of test features and reference features in a multi-dimensional fe |
| 7379838 |
Programmable image computer |
May 27, 2008 |
| An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for |
| 7251586 |
Full swath analysis |
July 31, 2007 |
| An inspection system for detecting anomalies on a substrate. A first network is coupled to the sensor array and communicates image data. Process nodes are couple to the first network, and process the data to produce reports. Each process node has an interface card that formats the da |
| 7218768 |
Inspection method and apparatus for the inspection of either random or repeating patterns |
May 15, 2007 |
| The present invention is a hybrid technique for finding defects on digitized device images using a combination of spatial domain and frequency domain techniques. The two dimensional spectra of two images are found using Fourier like transforms. Any strong harmonics in the spectra are |
| 7181368 |
Status polling |
February 20, 2007 |
| An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first h |
| 7149642 |
Programmable image computer |
December 12, 2006 |
| An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for |
| 7076390 |
Memory load balancing |
July 11, 2006 |
| An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data un |
| 7024339 |
Full swath analysis |
April 4, 2006 |
| An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates image data. Process nodes are coupled to the first network, and processes the data to produce reports. Each process node has an interface card that formats the data |
| 6665432 |
Inspection method and apparatus for the inspection of either random or repeating patterns |
December 16, 2003 |
| The present invention is a hybrid technique for finding defects on digitized device images using a combination of spatial domain and frequency domain techniques. The two dimensional spectra of two images are found using Fourier like transforms. Any strong harmonics in the spectra are |
| 6137570 |
System and method for analyzing topological features on a surface |
October 24, 2000 |
| Disclosed is a method and apparatus for using far field scattered and diffracted light to determine whether a collection of topological features on a surface (e.g., a semiconductor wafer) conforms to an expected condition or quality. This determination is made by comparing the far fi |
| 6021214 |
Inspection method and apparatus for the inspection of either random or repeating patterns |
February 1, 2000 |
| The present invention is a hybrid technique for finding defects on digitized device images using a combination of spatial domain and frequency domain techniques. The two dimensional spectra of two images are found using Fourier like transforms. Any strong harmonics in the spectra are |
| 5537669 |
Inspection method and apparatus for the inspection of either random or repeating patterns |
July 16, 1996 |
| The present invention is a hybrid technique for finding defects on digitized device images using a combination of spatial domain and frequency domain techniques. The two dimensional spectra of two images are found using Fourier like transforms. Any strong harmonics in the spectra are |
