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Inventor: Lim; Jung-Hyurk
Address: Evanston, IL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7102656 |
Electrostatically driven lithography |
September 5, 2006 |
| A method of nanolithography includes transporting a patterning compound from a nanoscopic tip to a substrate to form a pattern on the substrate. The patterning compound has a first electrostatic charge and the substrate has a second electrostatic charge which is opposite to the first |
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