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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Lim; Jung-Hyurk
Address:
Evanston, IL
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7102656 Electrostatically driven lithography September 5, 2006
A method of nanolithography includes transporting a patterning compound from a nanoscopic tip to a substrate to form a pattern on the substrate. The patterning compound has a first electrostatic charge and the substrate has a second electrostatic charge which is opposite to the first


 
 
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