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Inventor: Leung; Garlen C.
Address: San Jose, CA
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601050 |
Polishing apparatus with grooved subpad |
October 13, 2009 |
| A polishing apparatus is described. The polishing apparatus includes a rotatable platen, a drive mechanism to incrementally advance a polishing sheet having a polishing surface in a linear direction across the platen, a subpad on the platen to support the polishing sheet, the subpad havi |
| 7553214 |
Polishing article with integrated window stripe |
June 30, 2009 |
| A method is described. The method includes contacting a non-solid material to a non-linear edge of a sheet of polishing material, and causing the non-solid material to solidify to form a window that contacts the non-linear edge of the polishing material. |
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