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Inventor: Lee; Sun-Yong
Address: Suwon, KR
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5740065 |
Method for manufacturing semiconductor device |
April 14, 1998 |
| A method for manufacturing a semiconductor device comprises the steps of extracting an optimal working condition by accumulatively averaging accumulated working conditions of lots previously performed in an expectation process to be currently performed in the manufacturing equipment, |
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