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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Lee; Ho Seok
Address:
Gyeonggi-do, KR
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
6838369 Method for forming contact hole of semiconductor device January 4, 2005
A method for forming a contact hole of a semiconductor device, wherein a polymer residual on a bottom surface of the contact hole is treated with plasma of mixture gas containing oxygen to convert the polymer residual into a pure silicon oxide film free of carbon and fluorine for easy










 
 
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