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L'Bassi; Michael
Sterling, MA
No. of patents:

Patent Number Title Of Patent Date Issued
7706925 Integrated pressure and flow ratio control system April 27, 2010
An integrated pressure and flow ratio control system includes N mass flow controllers MFC.sub.i (i=1, . . . , N) that each control the flow rate of a fluid F.sub.i (i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communica
7467027 Compensation for thermal siphoning in mass flow controllers December 16, 2008
A thermal mass flow controller for controlling flow rate of a fluid includes a conduit configured to receive the fluid, a pressure sensor that measures the pressure of the fluid as the fluid flows within the conduit, a temperature sensor that measures the ambient temperature of the f
7296465 Vertical mount mass flow sensor November 20, 2007
A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal s
7000465 Attitude error self-correction for thermal sensors of mass flow meters and controllers February 21, 2006
A system for and method of compensating for attitude sensitivity of at least two thermal sensor coils mounted on a tube through which a fluid flows along a common axis of flow for use in generating a flow measurement signal representative of the flow of fluid through the tube is disc

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