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Inventor:
Kuo; Jack
Address:
Pleasanton, CA
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
7811409 Bare aluminum baffles for resist stripping chambers October 12, 2010
Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.










 
 
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