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Inventor: Kuo; Jack
Address: Pleasanton, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7811409 |
Bare aluminum baffles for resist stripping chambers |
October 12, 2010 |
| Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer. |
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