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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Kocmanek; Karl H.
Address:
Orlando, FL
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
5252520 Integrated circuit interlevel dielectric wherein the first and second dielectric layers are form October 12, 1993
A method for forming a dielectric layer in an integrated circuit is disclosed. After a first dielectric layer is formed, a second dielectric layer is formed on top of the first layer. The second layer is formed by reducing precursor gas flow during the initial portion of the deposition


 
 
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