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Inventor: Kim; Heon D.
Address: Bubaleub, KR
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5490901 |
Method for forming a contact hole in a semiconductor device |
February 13, 1996 |
| A method for forming a contact hole in a semiconductor device, capable of obtaining a good step coverage in formation of metal wiring and contacts of a highly integrated circuit exhibiting a high topology. The method comprises a primary etching step including the steps of forming a first |
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