| Patent Number |
Title Of Patent |
Date Issued |
| 6835416 |
Apparatus for growing thin films |
December 28, 2004 |
| An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space th |
| 6689210 |
Apparatus for growing thin films |
February 10, 2004 |
| The invention relates to an apparatus for growing thin films onto the surface of a substrate by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises at least one process chamber having a tightly sealable structure, at least |
| 6551406 |
Apparatus for growing thin films |
April 22, 2003 |
| An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space th |
| 6447607 |
Apparatus for growing thin films |
September 10, 2002 |
| The invention relates to an apparatus for growing thin films onto the surface of a substrate by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises at least one process chamber having a tightly sealable structure, at least |
| 4621379 |
Flushing operating means for vacuum toilet |
November 11, 1986 |
| Flushing operating means for a toilet or the like connected to a vacuum sewer, comprising flushing operating means such as a motor generating force by means of the vacuum of the sewer, a water valve, a sewer valve, and valve operating means for opening and closing of the water valve and |
