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Inventor:
Kilpi; Vaino
Address:
Espoo, FI
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
6835416 Apparatus for growing thin films December 28, 2004
An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space th
6689210 Apparatus for growing thin films February 10, 2004
The invention relates to an apparatus for growing thin films onto the surface of a substrate by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises at least one process chamber having a tightly sealable structure, at least
6551406 Apparatus for growing thin films April 22, 2003
An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space th
6447607 Apparatus for growing thin films September 10, 2002
The invention relates to an apparatus for growing thin films onto the surface of a substrate by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises at least one process chamber having a tightly sealable structure, at least
4621379 Flushing operating means for vacuum toilet November 11, 1986
Flushing operating means for a toilet or the like connected to a vacuum sewer, comprising flushing operating means such as a motor generating force by means of the vacuum of the sewer, a water valve, a sewer valve, and valve operating means for opening and closing of the water valve and










 
 
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