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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Kiesewetter; Jorg
Address:
Dresden, DE
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8094925 Method for increasing the accuracy of the positioning of a first object relative to a second obj January 10, 2012
A method is provided for increasing the accuracy of the positioning of a first object relative to a second object. The method overcomes the disadvantageous influence of thermal drift between a first and a second object during a positioning of a first object on a second object. The me
7046025 Test apparatus for testing substrates at low temperatures May 16, 2006
A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and
6864676 Substrate-holding device for testing circuit arrangements on substrates March 8, 2005
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which










 
 
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