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Kanda; Shoichi
Oshu, JP
No. of patents:

Patent Number Title Of Patent Date Issued
7860585 Heat processing apparatus, method of automatically tuning control constants, and storage medium December 28, 2010
A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rul

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