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Inventor: Jin; Seung Woo
Address: Gyeonggi-do, KR
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
August 18, 2009 |
| An ion implantation apparatus includes an ion beam source for generating an ion beam; an implantation energy controller disposed on a path of the ion beam for controlling the ion implantation energy of the ion beam so that an ion beam having a first implantation energy is created for a |
| 7554106 |
Partial ion implantation apparatus and method using bundled beam |
June 30, 2009 |
| An ion implantation apparatus comprises an ion beam source for generating an initial ion beam, a bundled ion beam generator adapted to change the initial ion beam into a bundled ion beam based on a predetermined frequency to pass the bundled ion beam for a first time while passing the |
| 7186627 |
Method for forming device isolation film of semiconductor device |
March 6, 2007 |
| A method for forming device isolation film of semiconductor device is provided, the method including forming a pad oxide film, a pad nitride film, and an oxide film for device isolation on a semiconductor substrate, etching a predetermined region of the oxide film for device isolatio |
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