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Inventor: Jang; Young-Chul
Address: Suwon, KR
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5863807 |
Manufacturing method of a semiconductor integrated circuit |
January 26, 1999 |
| A method of manufacturing a semiconductor device having a plurality of measuring steps performed by a plurality of measuring equipment comprising the steps of; (a) determining the operational state of each one of the plurality of measuring equipment, (b) selecting and performing a measur |
| 5740065 |
Method for manufacturing semiconductor device |
April 14, 1998 |
| A method for manufacturing a semiconductor device comprises the steps of extracting an optimal working condition by accumulatively averaging accumulated working conditions of lots previously performed in an expectation process to be currently performed in the manufacturing equipment, |
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